Microscopy > Components > Imaging Devices > XYZ Piezo-stage

XYZ Piezo-stage

When using the piezo stage, the laser beam stay put into a position; the sample is moved across the beam.

The stage is manufactured from a high performance Al alloy. actuators are preloaded within the PZT and supply the driving force for stage movement. The flexure hinges, which form the guidance mechanism, are cut into the stage using electric discharge machining (EDM). EDM is also used to form integrated amplifiers that increase the range of motion of the PZT actuators for the X, Y and Z axis. The PZT actuators are oriented perpendicular to the stage motion direction and within these amplifiers.

Piezo-stage Controller

The back panel of the XYZ piezo-controlled stage is shown in the picture. Each axis has the following front panel connections:

• input Analog input for command voltage (-10.0 to +10.0V)
• Sensor output 0.0 to 10.0 V buffered output on a BNC connector
    (The sensor output signal corresponds to a stage displacement of zero to the maximum displacement value)
• HV/10 (-0.5 to +15.0V) output on a BNC connector
• DB-9 9-Pin D-Type connector to nanopositioning stage offset adjustment for position sensing circuit

Translation (XY) 100 ± 10% µm
Translation (Z) 100 ± 10% µm
Resonance Frequency, Unloaded X-Axis 350 ± 20% Hz
Resonance Frequency, Unloaded Y-Axis 250 ± 20% Hz
Resonance Frequency, Unloaded Z-Axis 1000 ± 20% Hz
Stiffness 1.0 ± 20% N/µm
Maximum Load (hor/vert) 0.5 / 0.25 kg
Output Voltage Range -5 to +150 V
Output Current 150 mA
Analog Interface -10.0 to +10.0 V front panel BNC
Rear panel accessible output signals Output voltage ÷ 10 (-0.5 to +15.0V)
Position Signal (0.0 to 10.0 V)
Rear panel Adjustments Sensor Offset
Connector Type DB-9
Weight 4.5 Kg
Dimensions 425 x 90 x 355 mm
Power Requirement 120/240 VAC